process gpdk180

* file updated 4 January 2002
* Tricia Eckman, Sr. Technical Lead, Core Competency, Assura RCX
*
* Assura RCX procfile for GENERIC PDK Process
* Library Specification No. GPDK, Version 1.8
* Cadence Design Systems, Inc.
* PDK TECHNOLOGY CENTER, Melbourne, FL
*
* Process Description Input File for Capgen / Assura RCX
* maximum search distance for intra-layer lateral 10X minimum spacing
* maximum width 10X minimum width
* 2 layer combinations used for inter-layer fringe
*
* units are microns

deposition
*step #	material p/n	name	Z	diel_constant
step 1	substrate	sub	0.35	3.9
step 1	substrate	diff	0.005	3.9
step 2	metal		poly	0.20
step 3	dielectric p	ox1	0.50	4.0
step 4	metal		mt1	0.6
step 5	dielectric p	ox2a	0.60	3.7
step 6	dielectric p	ox2b	0.20	4.2
step 7	metal		mt2	0.6
step 8	dielectric p	ox3a	0.60	3.7
step 9	dielectric p	ox3b	0.20	4.2
step 10	metal		mt3	0.6
step 11	dielectric p	ox4a	0.60	3.7
step 12	dielectric p	ox4b	0.20	4.2
step 13	metal		mt4	0.6
step 14	dielectric p	ox5a	0.60	3.7
step 15	dielectric p	ox5b	0.20	4.2
step 16	metal		mt5	0.75
step 17	dielectric p	ox6a	0.60	3.7
step 18	dielectric p	ox6b	0.20	4.2
step 19	metal		mt6	3.00
step 20	dielectric n	pass1	1.00	4.2	1.0 1.0 90
step 21	dielectric n	pass2	0.70	7.9	0.7 0.7 90
step 22	dielectric p	air	40.0	1.0
enddeposition

metal_variations
*layer	name	s/w	min	max	increment
*(1X,2X,5X,10X)
layer	poly	w	0.18	0.36	0.18
layer	poly	w	0.90	1.80	0.90	
layer	poly	s	0.30	0.60	0.30
layer	poly	s	1.50	3.00	1.50
*
layer	mt1	w	0.30	0.60	0.30
layer	mt1	w	1.50	3.00	1.50
layer	mt1	s	0.30	0.60	0.30
layer	mt1	s	1.50	3.00	1.50
layer   mt1     s       6.00    6.01    1.0
*
layer	mt2	w	0.30	0.60	0.30
layer	mt2	w	1.50	3.00	1.50
layer	mt2	s	0.30	0.60	0.30
layer	mt2	s	1.50	3.00	1.50
layer   mt2     s       6.00    6.01    1.0
*
layer	mt3	w	0.30	0.60	0.30
layer	mt3	w	1.50	3.00	1.50
layer	mt3	s	0.30	0.60	0.30
layer	mt3	s	1.50	3.00	1.50
layer   mt3     s       6.00    6.01    1.0
*
layer	mt4	w	0.30	0.60	0.30
layer	mt4	w	1.50	3.00	1.50
layer	mt4	s	0.30	0.60	0.30
layer	mt4	s	1.50	3.00	1.50
layer   mt4     s       6.00    6.01    1.0
*
layer	mt5	w	0.30	0.60	0.30
layer	mt5	w	1.50	3.00	1.50
layer	mt5	s	0.30	0.60	0.30
layer	mt5	s	1.50	3.00	1.50
layer   mt5     s       7.50    7.51    1.0
*
layer	mt6	w	0.44	0.88	0.44
layer	mt6	w	1.76	3.52	1.76
layer	mt6	s	0.46	0.92	0.46
layer	mt6	s	1.84	3.68	1.84
layer   mt6     s       7.50    15.0    7.5
endmetal_variations

metal_combinations
*layers	name1	name2	s_min	s_max	increment
layers	poly	mt1	0.0	0.375   0.375
layers	poly	mt1	0.75    1.50	0.75
layers	poly	mt1	3.0	6.00	3.00
*
layers	poly	mt2	0.0	0.375   0.375
layers	poly	mt2	0.75    1.50	0.75
layers	poly	mt2	3.0	6.00	3.00
*
layers	mt1	mt2	0.0	0.375   0.375
layers	mt1	mt2	0.75    1.50	0.75
layers	mt1	mt2	3.0	6.00	3.00
*
layers	mt1	mt3	0.0	0.375   0.375
layers	mt1	mt3	0.75    1.50	0.75
layers	mt1	mt3	3.0	6.00	3.00
*
layers	mt2	mt3	0.0	0.375   0.375
layers	mt2	mt3	0.75    1.50	0.75
layers	mt2	mt3	3.0	6.00	3.00
*
layers	mt2	mt4	0.0	0.375   0.375
layers	mt2	mt4	0.75    1.50	0.75
layers	mt2	mt4	3.0	6.00	3.00
*
layers	mt3	mt4	0.0	0.375   0.375
layers	mt3	mt4	0.75    1.50	0.75
layers	mt3	mt4	3.0	6.00	3.00
*
layers	mt3	mt5	0.0	0.45    0.45
layers	mt3	mt5	0.9     1.80	0.90
layers	mt3	mt5	3.75    7.50	3.75
*
layers	mt4	mt5	0.0	0.45    0.45
layers	mt4	mt5	0.9     1.80	0.90
layers	mt4	mt5	3.75    7.50	3.75
*
layers	mt4	mt6	0.0	0.45    0.45
layers	mt4	mt6	0.9     1.80	0.90
layers	mt4	mt6	7.50    15.0	7.50
*
layers	mt5	mt6	0.0	0.45    0.45
layers	mt5	mt6	0.9     1.80	0.90
layers	mt5	mt6	7.50    15.0	7.50
endmetal_combinations

endprocess 
